Determination of reduced Young's modulus of thin films using indentation test

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Indentation measurements on thin films

Thin films have an important part to play in modern technology. It is difficult to characterize the mechanical properties of thin films because the films cannot usually be investigated separately from the substrate. One of the few methods that can be used for such investigations consists in making an indentation in the film by applying an extremely small and accurately controlled force while at...

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ژورنال

عنوان ژورنال: Acta Metallurgica Sinica (English Letters)

سال: 2009

ISSN: 1006-7191

DOI: 10.1016/s1006-7191(08)60125-8